CVD reactor Eva

Home build CVD reactor with control and safety equipment for the deposition of III-V semiconductor materials and structures on 2 inch diameter wafers (GaAs, InP, Ge).

Source lines: Al, In, Ga, As, P

Doping elements: Si, Zn, C

Availability 

Reactor is clean room based and only operated by an experienced AMS staff member. Samples can be prepared on request in cooperative research.