CV profiler

Capacitance-voltage profiler for carrier density or doping profile scans of semi-conductor samples. The method is destructive (sample is etched layer by layer) and requires upfront knowledge on the sample composition for the preparation of the electrolytes.

The interpretation of measured data is generally complex and requires upfront knowledge on the sample composition.  

Availability 

Instrument is clean room based and is only operated by experienced AMS staff members.

Sample scans can be made by an AMS staff member on request.